Liquid Helium, Liquid Nitrogen and Cryogen Free
Micro-manipulated Cryogenic & Vacuum Probe Systems for Chips, Wafers and Device Testing from ~3.5 K to 675 K
Janis micromanipulated probe stations are designed for non-destructive electrical testing using DC, RF, and fiber-optic probes. They are useful in a variety of fields including semiconductors, MEMS, superconductivity, electronics, ferroelectrics, material science, physics and optics. Either LHe/LN2 or a mechanical closed cycle refrigerator provides cooling. Different models locate the sample in ultra-high vacuum (UHV), ultra-high temperature (to 675 K), and magnetic field.
Please click here to download the probe station requirement questionnaire (59 KB). Since we have many different options for our probe stations, fill the questionnaire out and email it to Janis.
Interested in seeing what other Janis customers have accomplished with their probe stations? Click here to see a list of some of their research papers.
Probe Station Specifications Overview
| Probe Station Model | Cooling Method | Temperature Range
with Four Probe Arms | Magnetic Field | Vacuum | # of Probes | Max Sample Size | Vibration Level |
| ST-500 | LHe/LN2 | ~3.5 K -
475 K
(8 K - 675 K optional) | N/A | 10-5-10-6 mbar
(10-6-10-9 mbar optional) | 2-6
(7 optional) | 50 mm
(200 mm optional) | 25 nm |
| ST-500-EM (electromagnet) | LHe/LN2 | ~3.5 K -
475 K
(8 K - 675 K optional) | 0.6 T horizontal | | 4 | 50 mm | 25 nm |
| ST-500-SCON (superconducting magnet) | LHe/LN2 | 5 K - 420 K | 3 T vertical | 10-5-10-6 mbar | 2-6 | 50 mm | <1 micron |
| ST-500-PM (permanent magnet) | LHe/LN2 | up to 350 K
(up to 475 K optional) | 0.6 T horizontal
0.2 T vertical | | 4 (horizontal)
| 50 mm | |
| ST-500-UHV | LHe/LN2 | Contact Janis | | 10-7 mbar | Contact Janis | 50 mm | |
| ST-500-MC (mobile chuck) | LHe/LN2 | Contact Janis | | | Contact Janis | 50 mm | |
|
| CCR-4 | Closed Cycle (cryogen free) | 4.5 K - 350 K
(6 K -
475 K or 675 Koptional) | | | 2-6 | 50 mm | <1 micron |
| CCR-10 | Closed Cycle (cryogen free) | 10 K - 350 K
(11 K -
475 K or
675 K optional) | | | 2-6 | 50 mm | <1 micron |
| CCR-80 | Closed Cycle (cryogen free) | ~80 K -
350 K
(82 K to
475 K or
675 K optional) | | | 2-6 | 50 mm | <1 micron |
| CCR-EM (electromagnet) | Closed Cycle (cryogen free) | 10 K - 350 K
(15 K - 675 K optional) | 0.6 T horizontal | | 4 | 50 mm | <1 micron |
| CCR-SCON (superconducting magnet) | Closed Cycle (cryogen free) | 5 K- 420 K | 3T vertical | 10-5-10-6 mbar | 2-6 | 50 mm | <1 micron |
|
| RT-500 (room temperature) | N/A | 300 K -
500 K
(300 K - 650 K optional) | | | 2-6 | 50 mm | |
Temperature range varies depending on probe type. Specifications subject to change without notice.
