Products

Liquid Helium, Liquid Nitrogen and Cryogen Free

Micro-manipulated Cryogenic & Vacuum Probe Systems for Chips, Wafers and Device Testing  from ~3.5 K to 675 K


Janis micromanipulated probe stations are designed for non-destructive electrical testing using DC, RF, and fiber-optic probes. They are useful in a variety of fields including semiconductors, MEMS, superconductivity, electronics, ferroelectrics, material science, physics and optics. Either LHe/LN2 or a mechanical closed cycle refrigerator provides cooling. Different models locate the sample in ultra-high vacuum (UHV), ultra-high temperature (to 675 K), and magnetic field.


Please click here to read about Janis Research's new technique of cryogenic probe station special flexible probe tips that allows absorbing the probe arm thermal drift movement during variable DUT temperature measurements.


Please click here to read about Janis Research's patent pending, miniature transportable sample vacuum chamber for micro-manipuated probe stations.


Please click here to download the Probe Station datasheet (750 KB). The downloaded file will be in PDF format which is viewable and printable with Acrobat Reader, a free plug-in utility from Adobe.


To download the free acrobat plug-in software click here.


Please click here to download the probe station requirement questionnaire (59 KB). Since we have many different options for our probe stations, fill the questionnaire out and email it to Janis. 


Interested in seeing what other Janis customers have accomplished with their probe stations?  Click here to see a list of some of their research papers.  Click here for a presentation on Janis probe stations with a selection of applications and reference papers from a few of our probe station customers.


Probe Station Specifications Overview


Probe Station Model Cooling Method Temperature Range
with Four Probe Arms
Magnetic Field Vacuum # of Probes Max Sample Size Vibration Level
ST-500 LHe/LN2 ~3.5 K -
475 K
(8 K - 675 K optional)
N/A 10-5-10-6 mbar
(10-6-10-9 mbar optional)
2-6
(8 optional)
50 mm
(200 mm optional)
25 nm
ST-500-EM (electromagnet) LHe/LN2 ~3.5 K -
475 K
(8 K - 675 K optional)
0.6 T horizontal 4 50 mm 25 nm
ST-SCON (superconducting magnet) LHe/LN2 5 K - 420 K 3 T vertical  10-5-10-6 mbar  2-6 50 mm <1 micron 
ST-500-PM (permanent magnet) LHe/LN2 up to 350 K
(up to 475 K optional)
0.6 T horizontal
0.2 T vertical
  4 (horizontal)
50 mm  
ST-500-UHV LHe/LN2 Contact Janis   10-7-10-8 mbar Contact Janis 50 mm  
ST-100-MC (mobile chuck) LHe/LN2 Contact Janis     10-5-10-6 mbar
(10-6-10-9 mbar optional)
Contact Janis 50 mm (200 mm optional)  
ST-500-MC (mobile chuck) LHe/LN2 Contact Janis Contact Janis 50 mm
CCR-4 Closed Cycle (cryogen free) 4.5 K - 350 K
(6.5 K - 
475 K or 675 Koptional)
    2-6 50 mm <1 micron
CCR-10 Closed Cycle (cryogen free) 9 K - 350 K
(11 K - 
475 K or
675 K optional)
    2-6 50 mm <1 micron
CCR-80 Closed Cycle (cryogen free)

~80 K -
350 K
(82 K to
475 K or
675 K optional)

    2-6 50 mm <1 micron
CCR-EM (electromagnet) Closed Cycle (cryogen free) 10 K - 350 K
(12 K - 675 K optional)
0.6 T horizontal   4 50 mm <1 micron
CCR-SCON (superconducting magnet) Closed Cycle (cryogen free) 5 K- 300 K 3T vertical
Vector: 
1.5 T vertical
1.0T horizontal
10-5-10-6 mbar  2-6 50 mm <1 micron
RT-500 (room temperature) N/A 300 K -
500 K
(300 K -
675 K optional)
    2-6 50 mm  
Temperature range varies depending on probe type.  Specifications subject to change without notice.

Janis Research's family of low vibration micromanipulated probe stations includes configurations for ultra high vacuum, electromagnet, permanent magnet and superconducting magnet. PLEASE CLICK on the product family you are interested in to be taken to that web page.

 

Janis Research's family of closed cycle refrigerator micromanipulated probe stations includes configurations for 6 K, 10 K and 80 K cryocoolers, electromagnets and superconducting magnet. PLEASE CLICK on the product family you are interested in to be taken to that web page.

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