Liquid Helium, Liquid Nitrogen and Cryogen Free
Micro-manipulated Cryogenic & Vacuum Probe Systems for Chips, Wafers and Device Testing from ~3.5 K to 675 K
Janis micromanipulated probe stations are designed for non-destructive electrical testing using DC, RF, and fiber-optic probes. They are useful in a variety of fields including semiconductors, MEMS, superconductivity, electronics, ferroelectrics, material science, physics and optics. Either LHe/LN2 or a mechanical closed cycle refrigerator provides cooling. Different models locate the sample in ultra-high vacuum (UHV), ultra-high temperature (to 675 K), and magnetic field.
Please click here to download the probe station requirement questionnaire (212 KB). Since we have many different options for our probe stations, fill the questionnaire out and submit to Janis. Once we determine a suitable configuration for your system and the options needed, we will quickly respond with complete system specifications and a quote. The downloaded file will be in PDF format which is viewable and printable with Acrobat Reader, a free plug-in utility from Adobe. To download the free acrobat plug-in software click here.
Probe Station Specifications Overview
| Probe Station Model | Cooling Method | Temperature Range
with Four Probe Arms | Magnetic Field | Vacuum | # of Probes | Max Sample Size | Vibration Level |
| ST-500 | LHe/LN2 | ~3.5 K -
475 K
(8 K - 675 K optional) | N/A | 10-5-10-6 mbar
(10-6-10-9 mbar optional) | 2-6
(7 optional) | 50 mm
(200 mm optional) | 25 nm |
| ST-500-EM (electromagnet) | LHe/LN2 | ~3.5 K -
475 K
(8 K - 675 K optional) | 0.6 T horizontal | | 4 | 50 mm | 25 nm |
| ST-500-SCON (superconducting magnet) | LHe/LN2 | 5 K - 420 K | 3 T vertical | 10-5-10-6 mbar | 2-6 | 50 mm | <1 micron |
| ST-500-PM (permanent magnet) | LHe/LN2 | up to 350 K
(up to 475 K optional) | 0.6 T horizontal
0.2 T vertical | | 4 (horizontal)
| 50 mm | |
| ST-500-UHV | LHe/LN2 | Contact Janis | | 10-7 mbar | Contact Janis | 50 mm | |
| ST-500-MC (mobile chuck) | LHe/LN2 | Contact Janis | | | Contact Janis | 50 mm | |
|
| CCR-5 | Closed Cycle (cryogen free) | 4.5 K - 325 K
(4.5 K -
500 K optional) | | | 2-6 | 50 mm | <1 micron |
| CCR-10 | Closed Cycle (cryogen free) | 10 K - 325 K
(15 K -
675 K optional) | | | 2-6 | 50 mm | <1 micron |
| CCR-80 | Closed Cycle (cryogen free) | Contact Janis | | | 2-6 | 50 mm | <1 micron |
| CCR-EM (electromagnet) | Closed Cycle (cryogen free) | 10 K - 325 K
(15 K - 675 K optional) | 0.6 T horizontal | | 4 | 50 mm | <1 micron |
| CCR-SCON (superconducting magnet) | Closed Cycle (cryogen free) | 5 K- 420 K | 3T vertical | 10-5-10-6 mbar | 2-6 | 50 mm | <1 micron |
|
| RT-500 (room temperature) | N/A | 300 K -
500 K
(300 K - 650 K optional) | | | 2-6 | 50 mm | |
Temperature range varies depending on probe type. Specifications subject to change without notice.
