Liquid Helium, Liquid Nitrogen and Cryogen Free
Micro-manipulated Cryogenic & Vacuum Probe Systems for Chips, Wafers and Device Testing from ~3 K to 650 K
For over twenty years, Janis Research (and its subsidiary RMC) has been offering an entire line of vacuum and cryogenic probing systems for chips, wafers and packaged devices. Government laboratories, industry and universities around the world use these systems. They can be used in various fields including semiconductors, MEMS, superconductivity, electronics, ferroelectrics, material science, physics and optics. Cryogenic probers are available as tabletop or stand-alone systems. They include an ultra high efficiency continuous flow cryostat system that utilizes liquid helium or liquid nitrogen (temperatures range from below 3 K to 500 K [650 K optional]), and offer fast cool down without introducing any vibrations to the sample. Vibration isolated cryogen-free systems eliminate the need for liquid helium or liquid nitrogen. Probe your devices with DC pulses and low frequency signals, microwave signals, or both with typically four probes in one system (also available with two, six or eight probes). Probe station designs incorporating an electromagnet, superconducting magnet, or permanent magnet are available for field dependent measurements. Quality workmanship is standard in every system we build. With over forty-five years of continuous operation, total dedication to excellence, and our customer support before and after purchasing, Janis Research has become the best choice for all your standard and custom cryogenic requirements.
Please click here to download the probe requirement questionnaire (212 KB). The downloaded file will be in PDF format which is viewable and printable with Acrobat Reader, a free plug-in utility from Adobe.
To download the free acrobat plug-in software click here.
LHe/LN2 Cooled Systems
Room Temperature Vacuum Systems (Contact Janis for more information.)
Specifications Overview
| Type | LHe/LN2 Cooled | Closed Cycle Refrigerator Cooled | Ultra High Vacuum | Vacuum |
| Model | ST-500 Probe Station | ST-100 Probe Station | 10 K | 5 K | UHV-ST-400 | RT-SP |
| Operating Temperature | LHe:
3 K - 475 K
LN2:
80 K - 500 K
(650 K optional) | LHe:
5 K - 475 K
LN2:
80 K - 500 K
(700 K optional) | 11 K - 325 K
(8 K optional base temperature;
500 K or
650 K optional) | 4.5 K - 325 K
(500 K or
650 K optional) | 5 K - 650 K | 300 K - 650 K |
| Sample Size | standard 52 mm diameter
(larger optional) | 25 - 50 mm diameter
(100 mm optional) | standard 52 mm diameter
(larger optional) | 25 - 50 mm diameter
(100 or larger mm optional) |
| Vibration Level | ± 25 nm | <1 micron |
| Probe Coverage | 25 - 50 mm diameter | 14 - 50 mm diameter
(100 mm optional) | 50 mm diameter | 14 - 50 mm diameter
(100 mm optional) |
| View individual product pages for more detailed information. |