The Janis cryogen-free series probe stations provide the researcher with vacuum and cryogenic probing capabilities without requiring the use of liquid cryogens. 4 K, 10 K and 80 K cryocoolers utilize proven Gifford-McMahon (G-M) technology for reliable and affordable sample cooling. Typical applications include MEMS, nanoscale electronics, superconductivity, ferroelectrics, material sciences and optics.
Interested in seeing what other Janis customers have accomplished with their probe stations? Click here to see a list of some of their research papers. Click here for a presentation on Janis probe stations with a selection of applications and reference papers from a few of our probe station customers.
Main features of Cryogen Free Probe Stations:
- Less than 1 micron vibration
- Temperature range (with 4 probe arms installed) from 4.5 K to 350 K (optional: 6.5 K to 475 K or 6.5 K to 675 K)
- Accommodates up to 2” (51 mm) diameter wafers (optional: up to 8” [200 mm]) (see specifications chart for more details)
- Up to eight cooled, easily interchangeable, micro-manipulated probe arms
- Electrical measurements from DC to 67 GHz
- Wide variety of inexpensive LF probe tips that are easy to replace
- Very low triaxial probe arms leakage current (typically 1 to 2 fA @ 1V)
- Non-contact, non-destructive Kelvin probes
- Multi-tip probes
- Fiber probe arms with single and multi mode fiber options
- Additional electrical feedthroughs with cables and wires to sample area
- Optional special miniature vacuum chamber to transfer sample under vacuum from Glove Box to Probe Station
- Precise translation X-Y-Z- travel stages for all monoscope system assemblies
- Optional movable chuck
- System customization options
Probe Station Datasheet
Please click here to download the Probe Station datasheet (750 KB). The downloaded file will be in PDF format which is viewable and printable with Acrobat Reader, a free plug-in utility from Adobe.
To download the free acrobat plug-in software click here.
Flexible Probe Tips
Please click here to read about Janis Research's new technique of cryogenic probe station special flexible probe tips that allows absorbing the probe arm thermal drift movement during variable DUT temperature measurements.
Probe Station Requirement Questionnaire
Please click here to download the probe station requirement questionnaire (59 KB). Since we have many different options for our probe stations, fill the questionnaire out and email it to Janis.
Click here to contact Janis today!