Products

Cryogen Free Micromanipulated Probe Stations

Overview

Click on image to enlarge view of model CCR12-1-4CX cryogen free micromanipulated probe station from Janis Research The Janis cryogen-free series probe stations provide the researcher with vacuum and cryogenic probing capabilities without requiring the use of liquid cryogens. 4 K, 10 K and 80 K cryocoolers utilize proven Gifford-McMahon (G-M) technology for reliable and affordable sample cooling. Typical applications include MEMS, nanoscale electronics, superconductivity, ferroelectrics, material sciences and optics.

Interested in seeing what other Janis customers have accomplished with their probe stations? Click here to see a list of some of their research papers. Click here for a presentation on Janis probe stations with a selection of applications and reference papers from a few of our probe station customers.

Main features of Cryogen Free Probe Stations:

  • Less than 1 micron vibration
  • Temperature range (with 4 probe arms installed) from 4.5 K to 350 K (optional: 6.5 K to 475 K or 6.5 K to 675 K)
  • Accommodates up to 2” (51 mm) diameter wafers (optional: up to 8” [200 mm]) (see specifications chart for more details)
  • Up to eight cooled, easily interchangeable, micro-manipulated probe arms
  • Electrical measurements from DC to 67 GHz
  • Wide variety of inexpensive LF probe tips that are easy to replace
  • Very low triaxial probe arms leakage current (typically 1 to 2 fA @ 1V)
  • Non-contact, non-destructive Kelvin probes
  • Multi-tip probes
  • Fiber probe arms with single and multi mode fiber options
  • Additional electrical feedthroughs with cables and wires to sample area
  • Optional special miniature vacuum chamber to transfer sample under vacuum from Glove Box to Probe Station 
  • Precise translation X-Y-Z- travel stages for all monoscope system assemblies
  • Optional movable chuck 
  • System customization options

Please click here to download the Probe Station datasheet (750 KB). The downloaded file will be in PDF format which is viewable and printable with Acrobat Reader, a free plug-in utility from Adobe.

To download the free acrobat plug-in software click here.

Please click here to read about Janis Research's new technique of cryogenic probe station special flexible probe tips that allows absorbing the probe arm thermal drift movement during variable DUT temperature measurements.

Please click here to download the probe station requirement questionnaire (59 KB). Since we have many different options for our probe stations, fill the questionnaire out and email it to Janis.

Click here to contact Janis today!

Probe Station Specifications

Vibration level: Less than 1 micron
Vacuum environment: 10-5-10-6 mbar
Temperature range* with four probe arms:







* Base temperature reduced with two probe arms.
CCR4: ~4.5 K to 350 K
              (Optional: 6.5 K to 475 K or 6.5 K to 675 K)
CCR5: ~5.5 K to 350 K
              (Optional: 7.5 K to 475 K or 7.5 K to 675 K)
CCR10: ~9 K to 350 K
               (Optional: 11 K to 475 K or 11 K to 675 K)
CCR12: ~11 K to 350 K
               (Optional: 13 K to 475 K or 13 K to 675 K)
CCR80: ~80 K to 350 K
               (Optional: 82 K to 475 K or 82 K to 675 K)
Temperature stability: ± 50 mK
Cooling time (for standard 2" diameter sample mount and 325 K maximum temperature): ~4-5 hours
Warming up time: ~90 min with quick warming up option (~5 hours without)
Sample mounts:
2" (51 mm) diameter standard
up to 4" (101 mm) optional
Grounded Chuck
Electrically Isolated Chuck with Bias Voltage Coaxial Cable
Triaxally Guarded Chuck with Cryogenic Triaxial Cable
Leadless Chip Carrier (LCC) Holder
Interchangeable Probe Arms: DC/LF probes: DC to 20 MHz with following tips available:
- Tungsten tips with 0.1 to 200 micron tip radius (optional gold plating)
- Special Tungsten bendable shank and tip (cat whisker) tips
- Beryllium Copper soft tip with low contact resistance

Coaxial or triaxial (typically 1 to 2 fA @ 1V leakage current) wiring
0.5pA @ 1V


Microwave probes:
0-40 GHz
0-50 GHz
0-67 GHz

Fiber probes:
Single Mode
UV-VIS or VIS-IR Multimode

Non-contact, non-destructive Kelvin probes

Multi-tip probes
Optical top viewport access: Standard 2.0" (51 mm) clear aperture
Optional up to 8" (200 mm) clear view
Monoscopes with LCD 19" monitor or USB camera and precise translation stages 7:1 zoom, 5 microns resolution (216X magnification)
12.5:1 zoom, 3.4 microns resolution (508X magnification)
16:1 zoom, 2.2 microns (626X magnification)
Probe travel: CCR-1 CCR-2
X-axis: 1" (25 mm) 2" (51 mm)
Y-axis: 1" (25 mm)
(15 mm with MW Probes)
2" (51 mm)
(45 mm with MW Probes)
Z-axis: 10 mm (18 mm optional) 10 mm (18 mm optional)
X-, Y-, Z-axes probe translation
(incremental units of graduation) 
10 microns 12.5 microns
Probe translation resolution: X, Y, Z-axes
Motorized stages with much higher translation resolution are available.
5 microns 6.25 microns

 

Optional Items for Probe Stations:

  • Additional interchangeable probe arms
  • Additional vacuum chamber ports for possible future upgrade with more probe arms
  • Additional electrical feedthroughs with cables and wires to sample area
  • Special miniature vacuum chamber to transfer sample under vacuum from glove box to probe station
  • Special optical windows including side window configurations and different window materials
  • Additional metering flow control valve with variable flow (3.6 to 72 Torrl/sec) to introduce different gases into the vacuum chamber
  • System customization options
  • Automatic Temperature Controllers
  • Turbo pumping station including a with a back-up mechanical pump or oil free diaphragm pump
  • Pump-line vibration isolator between the pump and the probe station
  • Low vapor pressure thermal anchoring greases

Request a Quote

Please click here to download the probe station requirement questionnaire (59 KB). Since we have many different options for our probe stations, fill the questionnaire out and email it to Janis.

Janis

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