Products

LHe/LN2 Cooled Probe Stations - ST-500 Series Low Vibration

Overview

Variable Temperature Cryostat

Click image to enlarge view of model ST-500-2-4MW40-1FO-7PORTS micro-manipulated probe station with low vibration The Janis ST-500 series probe stations are high performance research instruments designed to provide affordable vacuum and cryogenic probing of wafers and devices. The proven ST-500 cryostat is the platform for these probe stations, and includes low vibration technology (originally designed for high spatial resolution optical microscopy) to provide outstanding sample positional stability. Researchers around the world are using these systems to conduct research in a wide variety of fields, including MEMS, nanoscale electronics, superconductivity, ferroelectrics, material sciences, and optics.

Interested in seeing what other Janis customers have accomplished with their probe stations? Click here to see a list of some of their research papers. Click here for a presentation on Janis probe stations with a selection of applications and reference papers from a few of our probe station customers.

Main features of Model ST-500 Probe Stations:

  • Low vibration level and the positional drift
  • Temperature range from ~3.5 K to 475 K (optional: 8 K to 650 K) (depending on probes)
  • Works either with liquid nitrogen or liquid helium
  • Helium consumption less than 1 liter/hour
  • Accommodates up to 2” (51 mm) diameter wafers (optional: up to 8” [203 mm])
  • Up to seven cooled, easily interchangeable, micro-manipulated probe arms
  • Electrical measurements from DC to 67 GHz
  • Wide variety of inexpensive LF probe tips that are easy to replace
  • Very low triaxial probe arms leakage current of just a few fA
  • Non-contact, non-destructive Kelvin probes
  • Multi-tip probes
  • Fiber probe arms with single and multi mode fiber options
  • Optional optical access through the sample mount for transmission measurements
  • Additional electrical feedthroughs with cables and wires to sample area
  • Optional special miniature vacuum chamber to transfer sample under vacuum from Glove Box to Probe Station 
  • Very smooth X-Y-Z- travel stages for all monoscope system assemblies
  • Optional movable chuck
  • System customization options

Please click here to download the Probe Station datasheet (750 KB). The downloaded file will be in PDF format which is viewable and printable with Acrobat Reader, a free plug-in utility from Adobe.

To download the free acrobat plug-in software click here.

Please click here to read about Janis Research's new technique of cryogenic probe station special flexible probe tips that allows absorbing the probe arm thermal drift movement during variable DUT temperature measurements.

Please click here to download the probe station requirement questionnaire (59 KB). Since we have many different options for our probe stations, fill the questionnaire out and email it to Janis.

Probe Station Specifications

Vibration level: ± 25 nm
Positional drift: ± 150 nm in 30 minutes
Vacuum environment: Regular Vacuum (~10-5-10-6 mbar)
High Vacuum (~10-6-10-7 mbar)
Ultra High Vacuum (~10-8-10-9 mbar)
Temperature range: ~3.5 K to 475 K (DC Probes) (650 K optional)
~3.5 K to 450 K (MW Probes) (300 K - 535 K optional)
Cryogenic consumption: Helium:  less than 1 liter/hr; Nitrogen:  less than 0.1 liter/hr
Temperature stability: ± 50 mK
Cooling time (for standard 2" diameter sample mount): ~30 min to 10 K, ~60 min to 5 K
Warming up time: ~45 min with quick warming up option (~4 hours without)
Sample mounts:
2" (51 mm) diameter standard
up to 8" (203 mm) optional
Ground Chuck

Electrically Isolated Chuck with Bias Voltage Coaxial Cable

Special Chuck for Light Transmission Experiments

Leadless Chip Carrier (LCC) Holder
Interchangeable Probe Arms: DC/LF probes: DC to 20 MHz with following tips available:
- Tungsten tips with 0.1 to 200 micron tip radius (optional gold plating)
- Special Tungsten bendable shank and tip (cat whisker) tips
- Beryllium Copper soft tip with low contact resistance

Coaxial or triaxial (a few fAmps leakage currernt) wiring

Microwave probes:
0-40 GHz
0-50 GHz
0-67 GHz

Fiber probes:
Single Mode
UV-VIS or VIS-IR Multimode

Non-contact, non-destructive Kelvin probes

Multi-tip probes

Optical top viewport access: Standard 2.0" (51 mm) clear aperture
Optional up to 8" (203 mm) clear view
Monoscopes with LCD 19" monitor or USB camera and smooth travel stages 7.1 zoom, 5 microns resolution (216X magnification)
12.5:1 zoom, 3.4 microns resolution (508X magnification)
16.1 zoom 2.2 microns (626X magnification)
Probe travel:  ST-500-1 ST-500-2
X-axis: 1" (25 mm) 2" (51 mm)
Y-axis: 1" (25 mm)
(15 mm with MW Probes)
2" (51 mm)
(45 mm with MW Probes)
Z-axis: 10 mm (18 mm optional) 10 mm (18 mm optional)
X-, Y-, Z-axes probe translation (incremental units of graduation): 10 microns 12.5 microns
Probe translation resolution: X-, Y-, Z-axes:
Motorized stages with much higher translation resolution are available.
5 microns 6.25 microns

 

Optional Items for Probe Stations:

  • Additional interchangeable probe arms
  • Additional vacuum chamber ports for possible future upgrade with more probe arms
  • Special miniature vacuum chamber to transfer sample under vacuum from glove box to probe station
  • Moveable sample mount (chuck)
  • attocube nano-positioner linear movement or rotary stages incorporated into probe station
  • Additional electrical feedthroughs with cables and wires to sample area
  • Special optical windows including side and bottom window configurations and different window materials
  • Additional metering flow control valve with variable flow (3.6 to 72 Torrl/sec) to introduce different gases into the vacuum chamber
  • System customization options
  • Automatic Temperature Controllers
  • Turbo pumping station including a with a back-up mechanical pump or oil free diaphragm pump
  • Pump-line vibration isolator between the pump and the probe station
  • Pneumatic vibration isolation table with or without portable ultra-quiet air compressor
  • Mechanical pumping station for operation below 4.5 K by pumping helium vent port
  • Liquid nitrogen storage dewar with inlet adapter to accept the probe station transfer line
  • Low vapor pressure thermal anchoring greases

Request a Quote

Please click here to download the probe station requirement questionnaire (59 KB). Since we have many different options for our probe stations, fill the questionnaire out and email it to Janis.

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