Micro-manipulated
Cryogenic & Vacuum Probe
Systems
for Chips, Wafers and Device Testing
from ~3 K to 475 K
Introduction
For over twenty years, Janis Research (and its subsidiary RMC) has been offering an entire line of vacuum and cryogenic probing systems for chips, wafers and packaged devices. Government laboratories, industry and universities around the world use these systems. They can be used in various fields including semiconductors, MEMS, superconductivity, electronics, ferroelectrics, material science, physics and optics. Cryogenic probers are available as tabletop or stand-alone systems. They include an ultra high efficiency continuous flow cryostat system that utilizes liquid helium or liquid nitrogen (temperatures range from below 3 K to 475 K [600 K optional]), and offer fast cool down without introducing any vibrations to the sample. Probe your devices with DC pulses and low frequency signals, microwave signals, or both with typically four probes in one system (also available with two, six or eight probes). Quality workmanship is standard in every system we build. With over forty years of continuous operation, total dedication to excellence, and our customer support before and after purchasing, Janis Research has become the best choice for all your standard and custom cryogenic requirements.
LHe/LN2 Cooled Systems |
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ST-500 Series Probe Stations |
Other Liquid Helium Cooled
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Cryogen Free Cooled Systems |
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10 K Closed Cycle Refrigerator
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5 K Closed Cycle Refrigerator
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Ultra High Vacuum Systems |
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UHV Probe Station |
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Vacuum Systems |
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| Type | LHe/LN2 Cooled | Closed Cycle Refrigerator Cooled | Ultra High Vacuum | Vacuum | ||
| Model |
ST-500 Probe Station |
ST-100 Probe Station |
10 K | 5 K | UHV-ST-400 | RT-SP |
| Operating Temperature |
LHe: 3 K - 475 K LN2: 80 K - 475 K |
LHe: 5 K - 475 K LN2: 80 K - 475 K (700 K optional) |
10 K - 325 K (475 K optional) | 4.5 K - 325 K (475 K optional) | 5 K - 700 K | 300 K - 700 K |
| Sample Size | Up to 52 mm diameter |
25 - 50 mm (100 mm optional) diameter |
Up to 52 mm diameter | Up to 52 mm diameter | 25
- 50 mm (100 mm optional) diameter |
25 - 50 mm (100 mm optional) diameter |
| Vibration Level | +/- 25 nm | < 1 micron | ||||
| Probe Coverage | 25-50 mm diameter |
14 - 50 mm diameter (100 mm optional) |
50 mm diameter |
14 - 50 mm diameter (100 mm optional) |
14 - 50 mm diameter (100 mm optional) |
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| View individual product pages for more detailed information. | ||||||
Introduction 
2 Jewel Drive, P.O. Box 696 Wilmington, MA 01887-0696 USA TEL: +1-978-657-8750 FAX: +1-978-658-0349 E-Mail: sales@janis.com Policies |
