Micro-manipulated
Cryogenic & Vacuum Probe Systems
for Chips, Wafers and Device Testing 
from ~3 K to 475 K

LHe/LN₂ Cooled Probe Stations

ST-500 Series

The Janis ST-500 series probe stations are high performance research instruments designed to provide affordable vacuum and cryogenic probing of wafers and devices. The proven ST-500 cryostat is the platform for these probe stations, and includes low vibration technology (originally designed for high spatial resolution optical microscopy) to provide outstanding sample positional stability. Researchers around the world are using these systems to conduct research in a wide variety of fields, including MEMS, nanoscale electronics, superconductivity, ferroelectrics, material sciences, and optics.

Variable Temperature Cryostat

A cryostat is at the center of every cryogenic probe station, and Janis has been a world leader in the design and manufacture of research cryostats for over forty-five years. The ST-500 cryostat provides a mechanism for cooling samples efficiently and effectively. The sample is mounted on a removable sample chuck (holder); sample chucks are available in a variety of configurations including grounded, coaxial, and triaxial. The sample is fully surrounded by a thermal shield to minimize radiant sample heating, resulting in the lowest possible sample temperature. A high efficiency transfer line is used to provide sample cooling using either LHe or LN2, and includes an integrated adjustable cryogen flow control valve. Two silicon diode thermometers and a high wattage heater are used to regulate and monitor the sample temperature within the broad operating temperature range of 3 K – 475 K. Optional optical access through the cryostat bottom flange makes transmission experiments possible.

Please click here to download the ST-500 series Probe Station datasheet (228 KB).  The downloaded file will be in PDF format which is viewable and printable with Acrobat Reader, a free plug-in utility from Adobe.

To download the free acrobat plug-in software click here.

Standard Equipment

• Low vibration model ST-500 cryostat with integrated vacuum chamber, sample mount, and cooled radiation shield.
   
• High efficiency LHe/LN2 transfer line with needle valve flow control.
   
• Two silicon diode thermometers, installed at the control heat exchanger and at the sample mount.
   
• Cartridge heater for temperature control.
   
• Cooled radiation shield window.
   
• Four integrated X-Y-Z probe station stages with probe support arms, cooled probe holders and LF or MW probes.
   
• Four edge welded metal bellows to permit probe translation.
   
• 10-pin electrical feedthrough.

Optional Equipment

• Monoscope with fiber-optic light source, vertical boom stand with vertical and horizontal adjustment, CCD camera, LCD color monitor. Available models include zoom of 7:1, 12.5:1, 16:1.
   
• Cryogenic temperature controllers from the leading controller suppliers. Each controller supplied by Janis includes full integration and testing with the system.
   
• Turbopump station including 52 L/s turbomolecular pump, wide range vacuum gauge and readout, stainless steel flexible pumping line. Available with mechanical or dry diaphragm backing pump.
   
• Vibration isolation table, 30” x 30” work surface secured to black anodized frame utilizing pneumatic isolators.
   
• Portable ultra-quiet air compressor for vibration isolation table.
   
• LN-50 liquid nitrogen storage dewar, with adapter to match the Janis high efficiency transfer line.

* 50 mm including Y-stage pivot.

Table of Contents	Pages
Introduction	1
LHe/LN2 Cooled Probe Stations - ST-500 series	2
LHe/LN2 Cooled Probe Stations - other LHe cooled systems	3
Cryogen Free Probe Stations	4
Ultra High Vacuum Probe Stations	5
Vacuum Probe Stations	6
Micromanipulated Translation Stages	7
Probe Options	8