Micro-manipulated
Cryogenic & Vacuum Probe Systems
for Chips, Wafers and Device Testing 
from ~3 K to 475 K

Cryogen Free Probe Stations

The Janis cryogen-free series probe stations provide the researcher with vacuum and cryogenic probing capabilities without requiring the use of liquid cryogens. 10 K and 4 K cryocoolers utilize proven Gifford-McMahon (G-M) technology for reliable and affordable sample cooling. Typical applications include MEMS, nanoscale electronics, superconductivity, ferroelectrics, material sciences and optics.

Cryostat

Every cryogenic probe station requires a cryostat, and Janis has been a world leader in the design and fabrication of research cryostats for over 45 years. The successful application of this extensive cryogenic design experience now enables cooling and probing of samples without the use of cryogens, and without the introduction of unwanted vibrations and noise to the sample. The sample is mounted on a removable sample holder (chuck); sample chucks are available in a variety of configurations including grounded, coaxial, and triaxial. The sample is fully surrounded by a thermal radiation shield, resulting in the lowest possible sample temperature. The cryocooler is connected to the chuck and thermal shield via proprietary low vibration / high thermal conductivity links. Silicon diode thermometers and a high wattage heater are used to monitor and control the sample temperature stability within 100 mK at any temperature within the operating range.

Please click here to download the Cryogen Free series Probe Station datasheet (190 KB).  The downloaded file will be in PDF format which is viewable and printable with Acrobat Reader, a free plug-in utility from Adobe.

To download the free acrobat plug-in software click here.

Standard Equipment

• Cryocooler with matching compressor and flexible helium gas lines, fully charged with high purity helium gas.
   
• Integrated pneumatic vibration isolated support stand with air storage tank.
   
• Two silicon diodes installed for control and monitoring of sample temperature.
   
• Cartridge heater for temperature control.
   
• Cooled thermal radiation shield with window installed.
   
• Four integrated X-Y-Z probe station stages with probe support arms, cooled probe holders, and LF or MW probes.
   
• Four edge welded metal bellows to permit probe translation.
   
• Electrical feedthrough for thermometers and heater.

Optional Equipment

• Monoscope with fiber-optic light source, vertical boom stand with vertical and horizontal adjustment, CCD camera, LCD color monitor. Available models include zoom of 7:1, 12.5:1, 16:1.
   
• Cryogenic temperature controllers from the leading controller suppliers. Each controller supplied by Janis includes full integration and testing with the system.
   
• Turbopump station including 52 L/s turbomolecular pump, wide range vacuum gauge and readout, stainless steel flexible pumping line. Available with mechanical or dry diaphragm backing pump.
   
• Portable ultra-quiet air compressor for vibration isolation table.
   
• Micromanipulated optical port, for optical probing/excitation of samples.
   
• Integrated high temperature stage, to extend upper temperature limit to 450 K.

Mechanical Drawing of Model CCR4-MMP
5 K Closed Cycle Refrigerator Probe Station - Top View

Mechanical Drawing of 5 K Closed Cycle Refrigerator Probe Station - Side View

Mechanical Drawing of Model CCR-4LF-0-CX
10 K Closed Cycle Refrigerator Probe Station - Top View

Mechanical Drawing of Model CCR-4LF-0-CX
10 K Closed Cycle Refrigerator Probe Station - Side View

Table of Contents	Pages
Introduction	1
LHe/LN2 Cooled Probe Stations - ST-500 series	2
LHe/LN2 Cooled Probe Stations - other LHe cooled systems	3
Cryogen Free Probe Stations	4
Ultra High Vacuum Probe Stations	5
Vacuum Probe Stations	6
Micromanipulated Translation Stages	7
Probe Options	8