Micro-manipulated
Cryogenic & Vacuum Probe Systems
for Chips, Wafers and Device Testing 
from ~3 K to 475 K

Ultra High Vacuum Probe Stations

Janis offers a complete range of probe stations suitable for making electrical measurements in a UHV environment.  Several standard designs are available, and systems can be custom configured to meet a wide variety of user requirements.  Janis has been manufacturing UHV compatible systems for over 40 years, and we apply this extensive experience to the design of every UHV probe station.  Typical UHV probe stations include:

• All stainless steel vacuum chamber with metal sealed flanges (CF)
• UHV rated electrical feedthroughs and electrical probes
• UHV rated optical viewport
• Fully bakeable to 120 °C
• Room temperature or cryogenic configurations
• Sample size 25 – 50 mm diameter. 
• 2 – 8 integrated x-y-z probe manipulators, with electrical probes installed
• Temperature range from 5 – 700 K available
• Monoscope, camera, and monitor for viewing samples and probes

Options include: 

• Larger diameter vacuum chamber and sample mount
• Load lock option for sample exchange without opening the chamber
• Integrated UHV turbopump for maximum pumping speed and lowest base pressure
• Vibration isolated stand

Table of Contents	Pages
Introduction	1
LHe/LN2 Cooled Probe Stations - ST-500 series	2
LHe/LN2 Cooled Probe Stations - other LHe cooled systems	3
Cryogen Free Probe Stations	4
Ultra High Vacuum Probe Stations	5
Vacuum Probe Stations	6
Micromanipulated Translation Stages	7
Probe Options	8