Micro-manipulated
Cryogenic & Vacuum Probe Systems
for Chips, Wafers and Device Testing 
from ~3 K to 475 K

Micromanipulated Translation Stages

Four independent X, Y, Z stages provide precise control over the probe motion within the range of travel. Each stage includes graduations in increments of 10 – 12.5 microns, with typical useful resolution of 5 – 6.25 microns. Stages used for microwave probes include theta rotation adjustment for planarization of the probe.
 

Table of Contents	Pages
Introduction	1
LHe/LN2 Cooled Probe Stations - ST-500 series	2
LHe/LN2 Cooled Probe Stations - other LHe cooled systems	3
Cryogen Free Probe Stations	4
Ultra High Vacuum Probe Stations	5
Vacuum Probe Stations	6
Micromanipulated Translation Stages	7
Probe Options	8