- Turbo pump with nominal 50 liters/second capacity
- 2.1 CFM dry scroll backing pump
- Innovative hermetic design, with motor and bearings outside the vacuum space
- Robust pumping speed of 60 l/min
- Cost effective and easy tip-seal replacement
- Entire station housed in a compact package (450 mm x 325 mm x 270 mm high, 17 kg weight)
- Wide range vacuum gauge (atmosphere to 10-9 Torr range) with digital display
- RS-232C serial computer interface and software to control system
- 5-foot flexible stainless steel pumping line
- Vacuum isolation valve
Click here for more information. (The link will open a PDF file of Varian's "Dry Turbo Pumping Systems: TPS-compact" brochure.) (771 KB)